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Feeding device Product List

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Continuous Slurry Supply Device P85

Achieved a cost reduction of over 15% compared to our conventional methods with a patented formulation! It can also be applied to supply uses such as catalyst slurries for fuel cells and secondary batteries!

The "Continuous Slurry Supply Device P85" is a device that supplies slurry applied during the wafer polishing process in semiconductor manufacturing. With the downsizing of the refrigeration unit and heater, the device's volume has been reduced by 61% compared to our conventional models, while the supply flow rate has increased. Additionally, the time required to supply from raw material replenishment has been significantly shortened from 52 minutes to 22 minutes compared to our conventional models. 【Features】 ■ Our unique blending method combines slurry and pure water (patent obtained) → Eliminates the need for a pump, achieving over 15% cost reduction compared to our conventional models. ■ Our proprietary heating method heats the slurry (patent obtained) → Achieves high efficiency and high response heating. *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

  • Other semiconductor manufacturing equipment

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Medication supply device (canister unit) P82

This is a device for storing concentrated solutions of 2 acidic and 1 alkaline liquid, and supplying the concentrated solutions through pressurized delivery using N2.

It is used for supplying concentrated liquid to CMP equipment. 【Features】 ■ Uses PTFE valves ■ Built-in exhaust damper * For more details about the product, please refer to the "PDF Download" button below. * Feel free to contact us with any inquiries.

  • Other semiconductor manufacturing equipment

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Dry Solvent HS Supply Unit C27A

Dry solvent HS supply

This device is designed to stably supply and circulate dry solvent HS at a constant pressure and temperature for the characteristic testing of test samples. *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

  • Other semiconductor manufacturing equipment

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Simple Slurry Supply Device P65

For wafer polishing

This is an experimental supply device for supplying a diluted mixture of slurry liquid from a tank to the equipment. 【Features】 ○ Tank capacity: 125L, ivory PVC ○ Diaphragm pump: 10 liters per minute ○ Supply air: 85 liters per minute ○ Power capacity: AC100V 5A

  • Other semiconductor manufacturing equipment

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Medication Supply Device (Continuous Type) P112

Continuous supply of chemical solution to the process equipment.

This device is designed to supply a predetermined concentration of chemical solution to a process device. 【Specifications】 ○External dimensions: W1720*D810*H2010 ○Weight: Approximately 800kg This device is designed to supply a predetermined concentration of chemical solution to a process device. It can supply a maximum of two types of chemical solutions through two systems. Details regarding operation, such as dilution concentration and supply volume, can be tailored to your requirements.

  • Other physicochemical equipment

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CMP slurry supply device P108

This device is designed to continuously supply slurry to a CMP device and has the capability to supply two types through two systems.

This device dilutes the slurry concentrate, supplies the slurry to the polishing equipment, controls the liquid supply temperature and pH value (optional feature), and is equipped with a mixing tank and a supply tank for continuous slurry supply. *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

  • Heating device

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